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MXenes 2D transition metal carbonitride

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position： home > Product > Two-dimensional material micro-nano processing - in situ testing

2-inch GaN self-supporting wafer (Fe doped)





ID：BK2020081703

CAS：

price：
$3700


Item ID：BK2020081703-18

specification：

5 minutes to choose the product plan

E-mail：mxenes@163.com

Detailed

Performance parameters:

2-inch Free-standing U-GaN Substrates
	Excellent level (S)		Production level (A)		Research level (B)		Dummy level (C)	Note: (1) Useable area: edge and macro defects exclusion (2) 3 points: the miscut angles of positions (2, 4, 5) are 0.35 ± 0.15°
	S-1	S-2	A-1	A-2
Dimension	50.8 ± 1 mm
Thickness	350 ± 25 μm
Orientation flat	(1-100) ± 0.5°, 16 ± 1 mm
Secondary orientation flat	(11-20) ± 3°, 8 ± 1 mm
Resistivity (300K)	> 1 x 106 Ω·cm for Semi-insulating (Fe-doped; GaN-FS-C-SI-C50)
TTV	≤ 15 μm
BOW	≤ 20 μm					≤ 40 μm
Ga face surface roughness	< 0.2 nm (polished) or < 0.3 nm (polished and surface treatment for epitaxy)
N face surface roughness	0.5 ~1.5 μm option: 1~3 nm (fine ground); < 0.2 nm (polished)
Package	Packaged in a cleanroom in single wafer container
Useable area	> 90%				>80%		>70%
Dislocation density	<9.9x10⁵ cm^-2	<3x10⁶cm^-2	<9.9x10⁵ cm^-2	<3x10⁶cm^-2	<3x10⁶cm^-2
Orientation：C plane (0001) off angle toward M-axis	0.35 ± 0.15°(3 points)		0.35 ± 0.15°(3 points)		0.35 ± 0.15°(3 points)
Macro defect density (hole)	0 cm2		< 0.3 cm ^-2		< 1 cm ^-2
Max size of macro defects			< 700 μm		< 2000 μm		< 4000 μm

Warm tip: the products supplied by Beijing Beike Xincai Technology Co., Ltd. are only used for scientific research, not for human body

Item ID	CAS	ID	Pack	Parameter	Stock	Make up	Price
BK2020081703-01		BK2020081703	Ga-抛光	等级：B	100		$3000
BK2020081703-02		BK2020081703	Ga-抛光	等级：C	100		$2600
BK2020081703-03		BK2020081703	Ga-抛光	等级：S-1	100		$5000
BK2020081703-04		BK2020081703	Ga-抛光	等级：S-2	100		$4000
BK2020081703-05		BK2020081703	Ga-抛光	等级：A-1	100		$4600
BK2020081703-06		BK2020081703	Ga-抛光	等级：A-2	100		$3600
BK2020081703-07		BK2020081703	N-抛光	等级：B	100		$3000
BK2020081703-08		BK2020081703	N-抛光	等级：C	100		$2600
BK2020081703-09		BK2020081703	N-抛光	等级：S-1	100		$5000
BK2020081703-10		BK2020081703	N-抛光	等级：S-2	100		$4000
BK2020081703-11		BK2020081703	N-抛光	等级：A-1	100		$4600
BK2020081703-12		BK2020081703	N-抛光	等级：A-2	100		$3600
BK2020081703-13		BK2020081703	Double-抛光	等级：B	100		$3100
BK2020081703-14		BK2020081703	Double-抛光	等级：C	100		$2700
BK2020081703-15		BK2020081703	Double-抛光	等级：S-1	100		$5100
BK2020081703-16		BK2020081703	Double-抛光	等级：S-2	100		$4100
BK2020081703-17		BK2020081703	Double-抛光	等级：A-1	100		$4700
BK2020081703-18		BK2020081703	Double-抛光	等级：A-2	100		$3700

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