E1-AUTO electric Z-axis low-dimensional material transfer system

E1-AUTO two-dimensional material transfer system, suitable for single point materials such as graphene, molybdenum sulfide, black phosphorus, precise point transfer, and preparation of multilayer van der Waals heterojunction. The transfer system consists of a microscopic system, a three-axis transfer table, and a vacuum adsorption heating integrated sample stage. The target substrate stage can be rotated at a large angle in the surface, which is a powerful tool for studying the characteristics of heterojunction, the symmetry breaking of spatial inversion, and the influence of different stacking methods of two-dimensional materials.

The E1-AUTO two-dimensional material transfer system is electrically upgraded on the E1-T basis. The E1-AUTO compatible slide slide platform is partially powered by the Z-axis lift and manual operation, which can achieve a slow fit of the heterojunction interface and reduce the transfer process. Defects such as bubbles are introduced to affect the interface transport properties. At the same time, the E1-AUTO compatible substrate carrier platform is electrically rotated and manually operated, which can be applied to stack to form double-layer twisted graphene and various twisted and misaligned heterojunction devices. The matching electric control software can conveniently set the speed and motion control of the electric table, and can rotate and transparent the photos, which greatly facilitates the search and accurate transfer of samples. E1-AUTO also has a variety of configuration options, including diamond high pressure anvil transfer module, sample stage high temperature module, rapid temperature rise and fall module, etc., while supporting the installation environment in the glove box.

Main configuration*

Substrate carrier platform XY direction two-axis translation, stroke 13mm; horizontal tilt angle adjustment 3~5 degrees; sample table heating maximum temperature is 150 °C; sample table with sample vacuum adsorption function
Substrate carrier platform Electric rotary table, adjustment range ±90 degrees, accuracy 0.1 degrees, automatic manual switching
Slide moving platform XY direction two-axis manual translation, stroke 25mm; fast rotation sample introduction device
Slide mobile platform Electric Z-axis and controller, stroke 25mm, accuracy 0.5um, automatic manual switching
Monocular microscope zoom ratio 1:6.5, zoom range 0.7X-4.5X; 20 times long working distance objective lens, 31 mm working distance
Micro Camera 12 Megapixel USB 3.0 Ultra HD CMOS Microscope Camera; Provides Micro Camera Operation Software
High-stability microscopic observation bracket XY direction two-axis translation, stroke 50mm large range to adjust the microscope observation position
Control cabinet system electrical control integration, control sample table heating, adsorption function, control micro-lighting brightness adjustment
Computer i3 processor, 8G memory, 1T hard drive, 23-inch high-definition display
Optional function Diamond high pressure anvil transfer module, sample stage high temperature module, rapid temperature rise and fall module, installation environment in glove box, supporting damping optical anti-vibration platform
* Please download the detailed configuration file for detailed parameters.

The standard configuration

☆☆☆ The electric Z-axis adopts imported motor and controller with a stroke range of 25mm and a minimum stroke accuracy of 0.5um. Speed multi-speed optional, with continuous travel function and single walk-in function, suitable for slow junction of heterojunction, automatic fit in glove box, etc. By precisely controlling the Z-axis movement speed, the interlayer bubbles formed during the transfer of the heterojunction can be reduced, and the fine control of the Z-axis in the glove box can be achieved.

☆☆☆Electric rotation adopts imported motor and controller with a rotation range of ±90° and an accuracy of 0.1°. Both continuous rotation and single-step rotation. It is especially suitable for stacking two-layer twisted graphene and other types of twisted and misaligned heterojunction two-dimensional devices that need to accurately control the stacking direction.

☆☆☆ E1-AUTO‘s electric control software can easily set the speed and motion control of the electric table. At the same time, it can rotate and transparently process the photos, which greatly facilitates the search and accurate transfer of samples.

The microstation has high stability and ensures no jitter in the micro imaging system under the operating conditions of the device. At the same time, it can perform two-axis translation in XY direction with a stroke of up to 50mm, which is convenient for large-scale adjustment of the microscope observation position to find samples.

The continuously adjustable zoom single-tube microscope uses a coaxial illumination source with a 20x ultra-long working distance objective lens and a 12-megapixel USB3.0 ultra-high-definition CMOS microscopy camera to clearly show the tear-off single-layer graphene sample on the silicon wafer. . Provides micro camera operation software for photo shooting, recording video, measuring sample size, and split screen comparison.

The substrate carrier platform is translated by two axes in the XY direction with a stroke of 13mm; the horizontal tilt angle is adjusted by 3~5 degrees; the maximum temperature of the sample stage is 150 °C; the vacuum adsorption function of the sample strip sample ensures that the target sample position is accurately fixed during the transfer process. The vacuum pump can be controlled by a solenoid valve with a vacuum pump flow rate of 50 L/min.

The slide moving platform is manually translated by two axes in the XY direction, and the stroke is 25mm, which can ensure the adjustment of the sample position and has a fast rotary sample introduction device.

Optional function

Option 1: Sample stage high temperature module

The sample stage is heated to a maximum temperature of 220~240 °C module (with micro air cooling)

Option 2: Quick rise and fall temperature module

The rapid temperature rise and fall module can realize rapid temperature rise and fall control, the temperature rise rate is up to 2 °C/s, the temperature drop speed is up to 1.5 °C/s, the maximum set temperature is 150 degrees, and the lowest set temperature is 10 degrees. At the same time, accurate temperature rise and fall control can be realized, the temperature rise and fall speed can reach 0.01 ° / s, the maximum deviation is less than 0.2 ° C, and the stable temperature deviation is less than 0.03 ° C. The computer software or temperature control panel operates to display the temperature in real time and control the temperature rise and fall.

Option 3: Installation in the glove box

For the transfer of certain special environmentally demanding materials such as perovskite, it can be installed in the environment of the transfer system glove box.

Option 4: supporting damped optical shockproof platform

Supporting damped optical anti-vibration platform to reduce environmental disturbance under high-speed operation (length and width 900*600*100mm table length and width 600*600*100mm table top and other specifications)

Option 5: Diamond high pressure anvil transfer module

Through specially designed fixtures and sample stages, both conventional transfer of two-dimensional materials and diamond-to-anvil transfer (the module does not contain high-voltage DACs, which can be customized according to customer size) can be used to further meet the high-pressure experimental samples of two-dimensional materials. Pre